EMFlex: the finite element solver for Maxwell's equations

EMFlex is an explicit time-domain finite element program for solving Maxwell's electromagnetics equations. The EMFlex package includes REVIEW, an X11 graphics post-processor for color plots of fields and on-screen movies of solution evolution. Fields of application include:

Photolithography: conventional and phase shifting masks, arbitrary incidence and polarization, periodic or isolated features

Diffraction and Imaging: Fourier optics, lenses and general diffractive elements

Propagation and Scattering: integrated circuit features, particles and structures in multi-layered substrates

Integrated Optics: waveguides, gratings, couplers, tapers, etc.

Gregory Wojcik

Principal